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Analysis of Three-dimensional Atom-probe Data by the Proximity Histogram
2000
Microscopy and Microanalysis
The three-dimensional (3D) atom-probe technique produces a reconstruction of the elemental chemical identities and three-dimensional positions of atoms field evaporated from a sharply pointed metal specimen, with a local radius of curvature of less than 50 nm. The number of atoms collected can be on the order of one million, representing an analysis volume of approximately 20 nm × 20 nm × 200 nm (80,000 nm3). This large amount of data allows for the identification of microstructural features in
doi:10.1007/s100050010051
fatcat:bwxkoqet6zb37plyuufyxopfqm