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Effect of pulse thermal treatments on the Ni(Ti)–n-21R(6H)-SiC contact parameters
2004
Semiconductor Physics, Quantum Electronics & Optoelectronics
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We present experimental investigations of the effect of rapid thermal treatment with incoherent IR radiation, as well as electric-spark and electron-beam treatments, on the electric parameters of Ni(Ti) n-21R(6H)-SiC contacts. The results obtained show that pulse thermal treatment is an efficient technique for local change of parameters of heterogeneous metal/ silicon carbide structures. Keywords: Ni(Ti) n-21R(6H)-SiC contacts, Schottky barrier, rapid thermal treatment, electricspark treatment,
doi:10.15407/spqeo7.03.272
fatcat:z2dt6l3cv5h3zd4jkshscnfya4