Effect of pulse thermal treatments on the Ni(Ti)–n-21R(6H)-SiC contact parameters

S.P. Avdeev, Taganrog State Radio Engineering University, 44, Nekrasovskii per., GSP-17A, 347928 Taganrog, Rostov Region, Russia
2004 Semiconductor Physics, Quantum Electronics & Optoelectronics  
We present experimental investigations of the effect of rapid thermal treatment with incoherent IR radiation, as well as electric-spark and electron-beam treatments, on the electric parameters of Ni(Ti) n-21R(6H)-SiC contacts. The results obtained show that pulse thermal treatment is an efficient technique for local change of parameters of heterogeneous metal/ silicon carbide structures. Keywords: Ni(Ti) n-21R(6H)-SiC contacts, Schottky barrier, rapid thermal treatment, electricspark treatment,
more » ... electron-beam treatment, atomic force microscopy, secondary ion mass spectroscopy. Paper received 17.06.04; accepted for publication 21.10.04.
doi:10.15407/spqeo7.03.272 fatcat:z2dt6l3cv5h3zd4jkshscnfya4