A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2006; you can also visit the original URL.
The file type is
Smart Structures and Materials 2002: Modeling, Signal Processing, and Control
In this work, the mechanical design and optimization of high-sensitivity piezoresistive cantilevers used for detecting changes in surface stresses due to binding and hybridization of biomolecules on the surface of the cantilever is investigated. The silicon-based cantilevers are typically of a micron order thickness doped with boron to introduce piezoresistivity. Microcantilever beams can be built as micro-mechanical arrays which could provide a basis for developing devices capable ofdoi:10.1117/12.475257 fatcat:5c6gzpfwwbaxbie6tsmyiwwiey