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Pumping behavior of sputter ion pumps

T. S. Chou, D. McCafferty
1981 Journal of Vacuum Science and Technology  

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doi:10.1116/1.570858 fatcat:fu4noe2evraxtnofhxxcqwe2vu
Citation

T. S. Chou, D. McCafferty. "Pumping behavior of sputter ion pumps." Journal of Vacuum Science and Technology 18.3 (1981) 1148-1151