Direct measurement of graphene adhesion on silicon surface by intercalation of nanoparticles

Zong Zong, Chia-Ling Chen, Mehmet R. Dokmeci, Kai-tak Wan
2010 Journal of Applied Physics  
We report a technique to characterize adhesion of monolayered/multilayered graphene sheets on silicon wafer. Nanoparticles trapped at graphene-silicon interface act as point wedges to support axisymmetric blisters. Local adhesion strength is found by measuring the particle height and blister radius using a scanning electron microscope. Adhesion energy of the typical graphene-silicon interface is measured to be 151Ϯ 28 mJ/ m 2 . The proposed method and our measurements provide insights in
more » ... tion and reliability of microelectromechanical/nanoelectromechanical systems.
doi:10.1063/1.3294960 fatcat:winzrhmfzzdbdd2qn7476gtuvi