Inner cercumference measurement with AF optical axis tilt method
AF光軸傾斜法による内周輪郭測定

Katsuhiro Miura, Atsuko Nose, Takao Tsukamoto
doi:10.11522/pscjspe.2020s.0_634 fatcat:xltg65jk6bc2jd5i5dwvtrrn4m