High Resolution STEM Tomography of Nanomaterials

I Arslan, JR Tong, D Medlin, PA Midgley
2006 Microscopy and Microanalysis  
Advances in nanotechnology have led to the demand and fabrication of smaller and smaller inorganic materials structures. One of the keys to successful device functionality is the ability to finely control the size, shape and electronic properties of the nanostructures. This requirement has prompted high resolution characterization using transmission electron microscopes (TEM), and most recently, to the development of three-dimensional tomographic imaging on the nanoscale using Zcontrast imaging
more » ... in the scanning transmission electron microscope (STEM) [1] .
doi:10.1017/s1431927606065159 fatcat:mcmkd4tjabc5zil7d7n6lbs5vy