A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2016; you can also visit the original URL.
The file type is application/pdf
.
A review of microelectromechanical systems for nanoscale mechanical characterization
2015
Journal of Micromechanics and Microengineering
A plethora of nanostructures with outstanding properties have emerged over the past decades. Measuring their mechanical properties and understanding their deformation mechanisms is of paramount importance for many of their device applications. To address this need innovative experimental techniques have been developed, among which a promising one is based upon microelectromechanical systems (MEMS). This article reviews the recent advances in MEMS platforms for the mechanical characterization of
doi:10.1088/0960-1317/25/9/093001
fatcat:orjxb6vtv5eajf2mhdrjfrhrum