Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae-Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard
2013 Optics Express  
We present a two-axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. In static mode, the scanner has total scan range of 10.2°
more » ... an range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.
doi:10.1364/oe.21.013800 pmid:23736634 fatcat:ooxo5wtjcjelppl34bd324s7fe