Photoacoustic Microscopy [report]

R. L. Thomas, L. D. Favro, P. K. Kuo
1984 unpublished
Recent advances in scanning photoacoustic microscopy (SPAM) for NDE are described. Conventional and phase-contrast modes are used to detect a well-characterized subsurface flaw in Al, and the results are shown to be in good agreement with calculations based upon a three-dimensional thermal diffusion model. Applications of the technique are given which demonstrate surface and subsurface flaw detection in complex-shaped ceramic turbine parts. Photoacoustic pictures are presented of an integrated
more » ... ircuit semiconductor chip and show 6 ~m resolution.
doi:10.21236/ada147615 fatcat:fikcupy5lnb63egaejych7gpr4