In this work; TiO 2 thin films were deposited on glass and stainless steel substrates by sol-gel spin coating method. The films deposited on glass were annealed at different temperatures (T a ) in the range of 200 to 500 0 C and that are deposited on steel substrate were annealed at 800 0 C. The optical properties of TiO 2 thin films were studied by using UV-VIS spectroscopy and photoluminescence (PL) spectroscopy. The transmittance on the average was found to ≥ 80 % and is found to sensitive

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... T a . The PL spectra exhibited the strong emission band associated with band-to-band transition around 390 nm and the two weak bands at 480 and 510 nm associated to the oxygen defects and surface defects respectively. The currentvoltage (I-V) characteristics of the Al/TiO 2 /steel capacitors were studied and analysed with application of various current mechanisms. Analysis reveals that the conduction in Al/TiO 2 /steel capacitors is governed by Poole-Frenkel mechanism.