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Synthesis of Novel .ALPHA.-Fluoroacrylates and Related Polymers for Immersion Lithography
Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)
The polymers of BTHB-MA and BTHB-2FA were determined the similar static and dynamic contact angle. However TTPD polymers were shown low receding angle. This rapid environmental response indicates the short side chain was contacting the water .doi:10.2494/photopolymer.21.673 fatcat:jzbkd44gvbg3tij5zx53hhkxdy