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Nanofabricated free-standing wire scanners for beam diagnostics with submicrometer resolution
Physical Review Accelerators and Beams
Results on fabrication and experimental characterization of wire scanners (WS) with submicrometer spatial resolution are presented. Independently fabricated at PSI and FERMI by means of nanolithography, the proposed WS solutions consist of 900 and 800 nm wide free-standing stripes ensuring a geometric resolution of about 250 nm. The nanofabricated WS were tested successfully at SwissFEL where lowcharge electron beams with a vertical size of 400-500 nm were characterized. Further experimentaldoi:10.1103/physrevaccelbeams.23.042802 fatcat:ie7mitnop5dc5fy2g5ard5n3wi