Mn doped CdO thin films were deposited by perfume atomizer spray pyrolysis method on glass substrate by varying substrate temperature (T=200 0 C, 225 0 C, 250 0 C, 275 0 C, 300 0 C). The Xray diffraction (XRD) analysis show that the prepared cadmium oxide thin films belongs to cubic structure with preferential orientation along with (111) direction. The thicknesses of the films were determined by Stylus profiler. The average optical transmittance of the CdO films in the range of 300 -800 nm, is

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... about 58%. Estimated band gap energy (E g ) is 2.65 eV and 2.5 eV. Photoluminescence (PL) spectra showed a strong emission peak around 523 nm. A systematic study on the influence of the substrate temperatures on the optical, electrical and structural properties of Mn doped CdO thin films deposited by perfume atomizer spray have been reported.