Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique

A.R. Khan, J. Stangl, G. Bauer, D. Buca, B. Hollander, H. Trinkaus, S. Mantl, R. Loo, M. Caymax
2006 2006 International SiGe Technology and Device Meeting  
doi:10.1109/istdm.2006.246492 fatcat:tqykhbgarfhzbommhq5cre6xky