A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf.
A.R. Khan, J. Stangl, G. Bauer, D. Buca, B. Hollander, H. Trinkaus, S. Mantl, R. Loo, M. Caymax. "Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique." 2006 International SiGe Technology and Device Meeting (2006)