Studies of laser induced-MOCVD zinc oxide films

Z. TAN, P. REN, W. LUO
1993 Journal de Physique IV : Proceedings  
Thin films of Z n O have been prepared by the double photobeams ultraviolet laser induced-metallorganic chemical vapour deposition ( MOCVD) technique. T h e structure and transparent photoconductive property of these f i l m s are investigated by X-ray diffractioniXRD) , reflecting electron diffraction ( RED) , scanning electron microscopy ( SEM) and
doi:10.1051/jp4:1993335 fatcat:yfhzsyubnrdtbcfhjzgcv7xwaa