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Modeling spatial variation is important for statistical analysis. Most existing works model spatial variation as spatially correlated random variables. We discuss process origins of spatial variability, all of which indicate that spatial variation comes from deterministic across-wafer variation, and purely random spatial variation is not significant. We analytically study the impact of across-wafer variation and show how it gives an appearance of correlation. We have developed a new die-leveldoi:10.1145/1629911.1629945 dblp:conf/dac/ChengGSQH09 fatcat:ipcmxhag2neolibffjmtrg2bj4