Internet Archive Scholar

Substrate impact on the low-temperature growth of GaN thin films by plasma-assisted atomic layer deposition

Seda Kizir, Ali Haider, Necmi Biyikli
2016 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films  

Preserved Fulltext

fulltext thumbnail
Web Archive Capture PDF (1.3 MB)
https://web.archive.org/web/20180723154152/http://repository.bilkent.edu.tr/bitstream/handle/11693/37308/Substrate%20impact%20on%20the%20low-temperature%20growth%20of%20GaN%20thin%20films%20by%20plasma-assisted%20atomic%20layer%20deposition.pdf;jsessionid=ECB8C6A03DB0227410D9B330EB8D4018?sequence=1

A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL. The file type is application/pdf.

doi:10.1116/1.4953463 fatcat:vzb4yjd345b47o3creqo7aq64u
Citation

Seda Kizir, Ali Haider, Necmi Biyikli. "Substrate impact on the low-temperature growth of GaN thin films by plasma-assisted atomic layer deposition." Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films 34.4 (2016) 041511