A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf.
Flexible high-frequency microwave inductors and capacitors integrated on a polyethylene terephthalate substrate
2010
Applied Physics Letters
Preserved Fulltext
This letter reports the realization of bendable inductors and capacitors integrated on a polyethylene terephthalate substrate that can operate at high microwave frequencies. A low-temperature fabrication process compatible with flexible thin-film transistors ͑TFTs͒ was developed. By employing bendable dielectric materials, spiral inductors and metal-insulator-metal capacitors with high quality factors and high resonance frequencies were demonstrated. The effects of mechanical bending on the
doi:10.1063/1.3280040
fatcat:vkdlrr4zinhqtdnrxdw5alj6hy