Novel Resist Materials Using Acid Amplifiers Part I

Koji Arimitsu, Soh Noguchi, Kunihiro Ichimura, Kazuaki Kudo, Takeshi Ohfuji, Masaru Sasago
1997 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  
doi:10.2494/photopolymer.10.313 fatcat:5avwsrz5jjfcnbidjtrxk3m5nu