We present an innovative waveguide based on the hybridization of a titanium dioxide nano-waveguide within a polymer strip. Through simulations and design we demonstrate that the waveguide sustains principally the quasi-TM fundamental mode and that even in tight bends (radius smaller than 2 μm) light remains confined in the titania layer. Such a waveguide, in addition of enabling low loss propagation is a way towards efficient evanescent sensing in highly integrated scheme, i.e., small

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... We also show that the fabrication, here based on electron beam lithography and atomic layer deposition, can be extended easily to large scale manufacturing using nanoimprinting technology.