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Simple way of finding Ba to Si deposition rate ratios for high photoresponsivity in BaSi2 films by Raman spectroscopy

Yudai Yamashita, Yuuki Takahara, Takuma Sato, Kaoru TOKO, Akira Uedono, Takashi Suemasu
2019 Applied Physics Express  

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Since the photoresponsivity of BaSi2 is sensitive to a Ba-to-Si deposition rate ratio (RBa/RSi), there is a need to determine the optimum value of RBa/RSi. We grew 0.5 μm-thick BaSi2 films with RBa/RSi varied from 1.1−3.6 at 580 °C and 0.4−4.7 and 650 °C. The photoresponsivity reached a maximum at RBa/RSi = 2.2 and 1.2, respectively. Raman spectroscopy revealed that the crystalline quality of BaSi2 became better with decreasing RBa/RSi. However, as RBa/RSi decreased further beyond these values,
more » ... excess Si precipitated, showing that the optimum value of RBa/RSi should be as small as possible without causing Si precipitates to form.
doi:10.7567/1882-0786/ab14b9 fatcat:tkzyy4hryfacvom3tfzl4n4voy
Citation

Yudai Yamashita, Yuuki Takahara, Takuma Sato, Kaoru TOKO, Akira Uedono, Takashi Suemasu. "Simple way of finding Ba to Si deposition rate ratios for high photoresponsivity in BaSi2 films by Raman spectroscopy." Applied Physics Express 12.5 (2019)