Analysis of high-Q photonic crystal L3 nanocavities designed by visualization of the leaky components

Kenichi Maeno, Yasushi Takahashi, Tatsuya Nakamura, Takashi Asano, Susumu Noda
2017 Optics Express  
We experimentally study photonic crystal L3 nanocavities whose design Q factors (Q design ) have been improved with the visualization of leaky components design method. The experimental Q values (Q exp ) are monotonically increased from 6,000 to 2,100,000 by iteratively modifying the positions of some of the air holes, as determined by the referred design method. We investigate the Q exp tolerance to imperfections in the fabricated samples, which reveals that the cavities improved by the
more » ... roved by the visualization method tend to lose some tolerance to structural differences between the fabricated samples and the design values.
doi:10.1364/oe.25.000367 pmid:28085831 fatcat:2myjcdn3vbboxo6f42to73fjam