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Development of nano-roughness calibration standards
2012
Measurement science and technology
At the Laboratory for Precise Measurements of Length, currently the Croatian National Laboratory for Length, unique nano-roughness calibration standards were developed, which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Ruder Bošković Institute. In this paper, a new design for a calibration standard with two measuring surfaces is presented. One of the surfaces is for the reproduction of roughness parameters, while the other is for the
doi:10.1088/0957-0233/23/3/035009
fatcat:b7utgivitzbghcbnkmf52ihgd4