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Microstructure analysis of polyurethane based polishing materials
2021
Plasticheskie massy
Preserved Fulltext
This paper presents the results of porous structure analysis of polishing materials based on polyurethanes used in chemicalmechanical planarization process of IC layers.
doi:10.35164/0554-2901-2021-1-2-3-6
fatcat:degqub5wmzcvzkulijg4t2p4r4