Conference Record of the 2004 IEEE Industry Applications Conference, 2004. 39th IAS Annual Meeting.
The ultrasonic stepping motor (USSM) using spatially shifted standing vibrations shows the advantages of high torque, good controllability and open-loop operation. Due to the segmentation problem of piezoelectric materials, the corresponding step size is practically limited. The purpose of this paper is to propose and implement micro-stepping control of this USSM. Different from the available half-step operation, the proposed control simultaneously varies both the combination of phasedoi:10.1109/ias.2004.1348432 fatcat:uzgqkl67r5d6za6gcfqfesvrkq