During the lifecycle of mechatronic manufacturing systems, repeatedly exchanges of different system elements have to be conducted. These system elements can be either single discipline-specific components, or modules composed of components or further modules. In order to ensure the elements' compatibility and the system's functionality, which must comply with the specification after the exchange, a model-based analysis of the change influences is presented in this paper. A SysML-based modeling

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... pproach is combined with the formal representation of the model in an OWL ontology to conduct the required compatibility check. By that, the disciplines involved in the engineering process, e.g. mechanics, electrics/electronics and software, can be modeled and taken into account for the analysis of change influences. Thus, this paper contributes to the domain of manufacturing systems by providing a meta model for the interdisciplinary modeling of manufacturing systems on the one hand and by defining a corresponding formal representation intended to ensure system elements' compatibility on the other hand.