(DS&T Thomas D. Callinan Award Presentation) Role of Hydrogen in Dielectrics for Electronics and Optoelectronics Devices

D. Misra
<span title="2013-05-02">2013</span> <i title="The Electrochemical Society"> <a target="_blank" rel="noopener" href="https://fatcat.wiki/container/ffdyfb4mkbd47bqfnjxygzk3xu" style="color: black;">ECS Transactions</a> </i> &nbsp;
In silicon-based electronic and optoelectronic devices hydrogen plays a significant role in passivating silicon dangling bonds. This improves the device performance and reliability of the devices by producing a high quality Si-SiO 2 interface. This work reviews the early use of hydrogen in standard silicon MOS devices with SiO 2 as gate dielectric to recent devices with high-k gate stacks. Role of hydrogen's isotope deuterium is outlined. In addition, the impact of hydrogen in high-k gate
more &raquo; ... trics on silicon and germanium substrates is also discussed. Contribution of hydrogen/deuterium in photodiode performance is also briefly described. 10.1149/05304.0033ecst ©The Electrochemical Society ECS Transactions, 53 (4) 33-42 (2013) 33 ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see Downloaded on 2018-07-19 to IP
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