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Optimizing & Automating EELS/EFTEM Parameters using Spectrum Simulation
Microscopy and Microanalysis
Electron energy-loss spectroscopy (EELS) in the TEM is widely recognized as a microanalytical tool capable of characterizing the elemental composition of materials with a spatial resolution approaching atomic scale and sensitivity approaching the single atom level. Due to the richness of the information in the EELS signal and complexity of the background shape, extracting quantitative compositional information from EELS data can be highly subjective and dependent on user experience. Despitedoi:10.1017/s1431927605508754 fatcat:nowbhtqhofao3logluwumvtice