Optimizing & Automating EELS/EFTEM Parameters using Spectrum Simulation

J A Hunt, N K Menon
2005 Microscopy and Microanalysis  
Electron energy-loss spectroscopy (EELS) in the TEM is widely recognized as a microanalytical tool capable of characterizing the elemental composition of materials with a spatial resolution approaching atomic scale and sensitivity approaching the single atom level. Due to the richness of the information in the EELS signal and complexity of the background shape, extracting quantitative compositional information from EELS data can be highly subjective and dependent on user experience. Despite
more » ... e difficulties, EELS is often the analysis method of choice due to its high detection efficiency which often translates to improved sensitivity. 1 This is often the case when dose is limited by the necessity to work with STEM probes at the limit of spatial resolution, during imaging when mapping time versus resolution tradeoffs are made, or when the sample is dose sensitive.
doi:10.1017/s1431927605508754 fatcat:nowbhtqhofao3logluwumvtice