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This paper presents a passive temperature compensation technique that can provide full cancellation of the linear temperature coefficient of frequency (TCF 1 ) in silicon resonators. A uniformly distributed matrix of silicon dioxide pillars is embedded inside the silicon substrate to form a homogenous composite silicon oxide platform (SilOx) with nearly perfect temperature-compensated stiffness moduli. This composite platform enables the implementation of temperature-stable microresonatorsdoi:10.1109/ted.2013.2270434 fatcat:6d5562nhjza5fpkkvdyg4jk3jq