Supplementary document for Broadband silicon grating couplers with high efficiency and robust design - 5723301.pdf

Daniil Zemtsov, Denis Zhigunov, Sergey Kosolobov, Anastasia Zemtsova, Marius Puplauskis, Ivan Pshenichnyuk, Vladimir Drachev
2022 figshare.com  
Method and results of the tolerance measurements
doi:10.6084/m9.figshare.20009006.v2 fatcat:yqfcabtnkfb3dn3fdjyh6iemye