A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL.
The file type is application/pdf
.
Supplementary document for Broadband silicon grating couplers with high efficiency and robust design - 5723301.pdf
2022
figshare.com
Method and results of the tolerance measurements
doi:10.6084/m9.figshare.20009006.v2
fatcat:yqfcabtnkfb3dn3fdjyh6iemye