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Visual modeling and design of microelectromechanical system transducers
2001
Microelectronics Journal
Microelectromechanical systems (MEMS) integrates miniaturized mechanical structures with electronics to extend the bene ts of planar integrated circuit technology to a broader class of systems. To realize the potential and growth of MENS, new modeling, analysis, and design techniques are required to address both mechanics and electronics. The close proximity o f the integration of mechanical and electrical domains within the small dimensions associated with very large scale integration (VLSI)
doi:10.1016/s0026-2692(99)00090-7
fatcat:piti7xsn3bflpdwdzkr6h6wsee