SEM application of the graphene-oxide-semiconductor type planar electron source
Graphene-Oxide-Semiconductor型平面電子源を搭載したSEMの開発

Yukino Kameda, Katsuhisa Murakami, Masayoshi Nagao, Hidenori Mimura, Yoichiro Neo
2021 Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science  
doi:10.14886/jvss.2021.0_3da07s fatcat:4zq37iamzjg73bkzzclwxrhwmu