A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2019; you can also visit the original URL.
The file type is application/pdf.
Hiroyuki MORI, Naoko TAKAHASHI, Kazuyuki NAKANISHI, Hideo TACHIKAWA, Toshihide OHMORI. "Low Friction Property of DLC-Si Films under Dry Sliding Condition." Journal of The Surface Finishing Society of Japan (2008) 401-407