Low Friction Property of DLC-Si Films under Dry Sliding Condition
大気中無潤滑下におけるDLC‐Si膜の低摩擦特性

Hiroyuki MORI, Naoko TAKAHASHI, Kazuyuki NAKANISHI, Hideo TACHIKAWA, Toshihide OHMORI
2008 Journal of The Surface Finishing Society of Japan  
doi:10.4139/sfj.59.401 fatcat:dhxk3pfoznftlmpozzh4yk2zf4