Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Patrick Rebsdorf Whelan, Binbin Zhou, Odile Bezencenet, Abhay Shivayogimath, Neeraj Mishra, Qian Shen, Bjarke Sørensen Jessen, Iwona Pasternak, David Michael Angus Mackenzie, Jie Ji, Sun Cunzhi, Pierre Seneor (+25 others)
2021 2D Materials  
Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
doi:10.1088/2053-1583/abdbcb fatcat:bfsumjjak5gppaiqbnk3hydjh4