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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Patrick Rebsdorf Whelan, Binbin Zhou, Odile Bezencenet, Abhay Shivayogimath, Neeraj Mishra, Qian Shen, Bjarke Sørensen Jessen, Iwona Pasternak, David Michael Angus Mackenzie, Jie Ji, Sun Cunzhi, Pierre Seneor (+25 others)
2021 2D Materials  

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Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
doi:10.1088/2053-1583/abdbcb fatcat:bfsumjjak5gppaiqbnk3hydjh4
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Patrick Rebsdorf Whelan, Binbin Zhou, Odile Bezencenet, Abhay Shivayogimath, Neeraj Mishra, Qian Shen, Bjarke Sørensen Jessen, Iwona Pasternak, David Michael Angus Mackenzie, Jie Ji, Sun Cunzhi, Pierre Seneor, Bruno Dlubak, Birong Luo, Frederik Østerberg, Deping Huang, Haofei Shi, Da Luo, Meihui Wang, Rodney S Ruoff, Ben Conran, Clifford McAleese, Cedric Huyghebaert, Steven Brems, Tim Booth, Ilargi Napal, Wlodzimierz Strupinskii, Dirch Hjorth Petersen, Stiven Forti, Camilla Coletti, Alex Jouvray, Ken B K Teo, Alba Centeno, Amaia Zurutuza, Pierre Legagneux, Peter Uhd Jepsen, Peter Boggild. "Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy." 2D Materials (2021)