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Lab on a Chip
Micro-and nanoelectromechanical systems, including cantilevers and other small scale structures, have been studied for sensor applications. Accurate sensing of gaseous or aqueous environments, chemical vapors, and biomolecules have been demonstrated using a variety of these devices that undergo static deflections or shifts in resonant frequency upon analyte binding. In particular, biological detection of viruses, antigens, DNA, and other proteins is of great interest. While the majority ofdoi:10.1039/b707401h pmid:17896006 fatcat:c75itqxnjfdhjlvgthzyl2qy7y