A tightly coupled non-equilibrium model for inductively coupled radio-frequency plasmas

A. Munafò, S. A. Alfuhaid, J.-L. Cambier, M. Panesi
2015 Journal of Applied Physics  
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more » ... ters Services, Directorate for Information Operations and Reports (0704-0188), 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to any penalty for failing to comply with a collection of information if it does not display a currently valid OMB control number. PLEASE DO NOT RETURN YOUR FORM TO THE ABOVE ADDRESS. relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. Non-equilibrium effects are treated by means of a hybrid State-to-State formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. Thermal non-equilibrium between the translation and vibrational of heavy-particles is accounted for by means of a multi-temperature approach. The results show that nonequilibrium plays an important role close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients. SUBJECT TERMS 16. SECURITY CLASSIFICATION OF: 17. LIMITATION OF ABSTRACT 18. NUMBER OF PAGES 19a. NAME OF RESPONSIBLE PERSON Jean-Luc Cambier a. REPORT Unclassified b. ABSTRACT Unclassified c. THIS PAGE Unclassified SAR 12 19b. TELEPHONE NO (include area code) 661-525-5649 Standard Form 298 (Rev. 8-98) ABSTRACT This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. Non-equilibrium effects are treated by means of a hybrid State-to-State formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. Thermal non-equilibrium between the translation and vibrational of heavy-particles is accounted for by means of a multi-temperature approach. The results show that non-equilibrium plays an important role close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients.
doi:10.1063/1.4931769 fatcat:g5t73wkxsre3vdfp2ggyqckuci