The role of processing speed in determining step patterns during directional epitaxy

Michael Saum, Tim Schulze
2008 Discrete and continuous dynamical systems. Series B  
We consider the growth of epitaxial thin film on a continously supplied substrate using both the Burton-Cabrara-Frank mean-field model and kinetic Monte-Carlo (KMC) simulation. Of particular interest are effects due to the finite size of the deposition zone. We find that Dirichlet boundary conditions in the substrate pulling direction produce a pattern of alternating step widths, with the relative spacing between the steps depending sensitively on the processing speed and on whether the number
more » ... whether the number of steps is odd or even. We find the mean-field model gives qualitive agreement when compared to standard KMC, and good quantitative agreement when the nucleation of new islands is disabled. 2000 Mathematics Subject Classification. Primary: 82B80, 82B21; Secondary: 82D25,65C05.
doi:10.3934/dcdsb.2009.11.443 fatcat:r4z6pyutvzeuhiyob7zbzwbruq