2015 MRS bulletin  
Scanning electron microscope image of a thin layer of ITO deposited on polymer linear gratings. Gratings are lines with a pitch of 700 nm, height of 350 nm, and width of 350 nm. Polymer gratings are fabricated using nanoimprint lithography. Nonuniform heat and pressure distribution leads to a non-ideal shape of gratings.
doi:10.1557/mrs.2015.25 fatcat:xkeko7hbnrb6hlazrfpicrluky