A model is described to simulate the formation of nanostructured materials by cluster beam deposition. Clusters are modelled by spherical balls with a given size distribution function, which fall to the substrate and stick to the growing structure. The mobility of clusters along the film surface is modelled by introduction of a critical angle at which a falling ball meets a ball that belongs to the structure. When the falling ball touches one of the balls in the structure at an angle smaller

more »

... n the critical one, it sticks to the film; otherwise the ball rolls along the surface till it meets other balls. It is shown that a variety of structures similar to those observed experimentally can be produced. The density of the model structures, percolation thresholds and the surface roughness are analyzed.