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A model is described to simulate the formation of nanostructured materials by cluster beam deposition. Clusters are modelled by spherical balls with a given size distribution function, which fall to the substrate and stick to the growing structure. The mobility of clusters along the film surface is modelled by introduction of a critical angle at which a falling ball meets a ball that belongs to the structure. When the falling ball touches one of the balls in the structure at an angle smallerdoi:10.5488/cmp.6.1.93 fatcat:oyybltbeybcifcpdk3ow4evvie