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Nanometer focusing of hard x rays by phase zone plates
1999
Review of Scientific Instruments
Focusing of 8 keV x rays to a spot size of 150 and 90 nm full width at half maximum have been demonstrated at the first-and third-order foci, respectively, of a phase zone plate ͑PZP͒. The PZP has a numerical aperture of 1.5 mrad and focusing efficiency of 13% for 8 keV x rays. A flux density gain of 121 000 was obtained at the first-order focus. In this article, the fabrication of the PZP and its experimental characterization are presented and some special applications are discussed.
doi:10.1063/1.1149744
fatcat:poet5ebgjfaqnnhhfc7wveu2zq