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Low Substrate Temperature Fabrication through Control of Growth of Nanoparticles in Reactive Plasma
反応性プラズマ中のナノ粒子制御によるSiNx膜の低温作製
2020
Meeting Abstracts of the Physical Society of Japan
反応性プラズマ中のナノ粒子制御によるSiNx膜の低温作製
Preserved Fulltext
