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Investigation of Chemomechanical Effects on Sapphire Surfaces Modified by Ion-Implantation-Induced Carbon Impurities
Journal of Bio- and Tribo-Corrosion
AbstractModification of the chemomechanical behaviour of the surface of sapphire by ion implantation to improve its near-surface mechanical properties has been investigated. 300 keV Ti+ ions at various doses were implanted and the concentration and damage profiles characterised using Rutherford Backscattering (RBS). At high doses (≥ 3 × 1016 Ti+ cm−2), a surface amorphous layer is formed due to implantation-induced damage. Nanoindentation was used to determine the hardness behaviour of thedoi:10.1007/s40735-021-00490-y fatcat:tzmcxhnod5gbng4h3dx7iiyxta