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Sputter-deposited films and multilayers are used for a wide variety of applications including protective coatings on turbine engine blades, magnetic recording heads, optical elements, electronic packaging, x-ray filters and . monochromator components to name a few examples. This wide range of interest requires growth thicknesses from a few nanometres to tens of micrometres depending on the product. In many applications, specific film textures in the growth direction as well as in the plane ofdoi:10.1088/0022-3727/28/4a/058 fatcat:vju6bdx53nblhgo6mlsztzw5qi