The evolution of texture in thin films and multilayers via synchrotron transmission Laue and grazing-incidence X-ray scattering

J C Bilello, S N Yalisove, Z U Rek
1995 Journal of Physics D: Applied Physics  
Sputter-deposited films and multilayers are used for a wide variety of applications including protective coatings on turbine engine blades, magnetic recording heads, optical elements, electronic packaging, x-ray filters and . monochromator components to name a few examples. This wide range of interest requires growth thicknesses from a few nanometres to tens of micrometres depending on the product. In many applications, specific film textures in the growth direction as well as in the plane of
more » ... s in the plane of growth are required. The control and manipulation of these textures can be accomplished by using advanced characterization techniques to select particular processing conditions. A variety of x-ray methods including grazing-incidence x-ray scattering, conventional pole figure studies and synchrotron white-beam transmission h u e scattering were used to study texture evolution for the thinnest films up to the thickest multilayer coatings
doi:10.1088/0022-3727/28/4a/058 fatcat:vju6bdx53nblhgo6mlsztzw5qi