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2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
We report on micro-machined flow-rate sensors as part of autonomous multi-parameter sensing devices for water network monitoring. Three different versions of the flow-rate sensors have been designed, fabricated and experimentally characterized. Those sensors are made of identical micrometric platinum resistors deposited on two different substrates-glass and silicon with and without insulation layer. The sensors were tested under the anemometric operating scheme. They were characterized under adoi:10.1109/dtip.2017.7984474 fatcat:flcemy2fprd5pbj2ira5dnyv24