A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is
Generation of ZnO nanoparticles was investigated using a coaxial gas-flow pulse plasma. We studied how zinc atoms, sputtered from a zinc target, reacted with oxygen in a plasma and/or on a substrate to form ZnO nanoparticles when the discharge parameters, such as applied pulse voltage and gas flow rate, were controlled in an O2/Ar plasma. The formation processes were estimated by SEM, TEM, and EDX. We observed many ZnO nanoparticles deposited on Si substrate. The particle yield and size weredoi:10.1155/2015/410468 fatcat:qnxxcadbh5emzm2f6wofgrfvqy