Generation Control of ZnO Nanoparticles Using a Coaxial Gas-Flow Pulse Plasma Ar/O2 Plasma

Hiroki Shirahata, Satoru Iizuka
2015 Journal of Nanoparticles  
Generation of ZnO nanoparticles was investigated using a coaxial gas-flow pulse plasma. We studied how zinc atoms, sputtered from a zinc target, reacted with oxygen in a plasma and/or on a substrate to form ZnO nanoparticles when the discharge parameters, such as applied pulse voltage and gas flow rate, were controlled in an O2/Ar plasma. The formation processes were estimated by SEM, TEM, and EDX. We observed many ZnO nanoparticles deposited on Si substrate. The particle yield and size were
more » ... ld and size were found to be controlled by changing the experimental parameters. The diameter of the particles was typically 50–200 nm.
doi:10.1155/2015/410468 fatcat:qnxxcadbh5emzm2f6wofgrfvqy