Microstructure and Magnetic Properties of Hexagonal Barium-Ferrite(BaM) Thin Films with Various Underlayers

Dong Hyoun KlM, In Tak NAM, Yang Ki HONG
2001 ITE Technical Report  
BaM thin films and underlayers (Fe, Cr. AI2Qi. Fe20r,. ZnFe204) were prepared on (100) ericnlcd bare Si substrate by using a RF/DC magnetron sputtering system, and were compared with crystal orientation. magnct{c properties and surface morphology. BaMfCrlSi fi1:n revealed the highest coercivity of BaM t-ilms with ali the underiayers. AII the BaM fi]ms except BaMIFe!Si film showed nearly same va]ues of perpendicuSar and in-planc cQercivities. Perpcndicular anisotropy was observed in BaMfFefSi
more » ... m. By adopting ZnFe!Oi as underlayen the interdifiUsion of Si from substrate was prohibited to some degree. EIongated grains from thc extinction of small parallet grains were grown with the increase ofthickness at no underlayer film.
doi:10.11485/itetr.25.69.0_99 fatcat:xbbqywcz75afjdngig4yfnnp6e