Ge-chalcogenide films show various photo-induced changes, and silver photo-diffusion is one of them which attracts lots of interest. In this paper, we report how silver and Ge-chalcogenide layers in Ge 33 S 67 /Ag/Si substrate stacks change under light exposure in the depth by measuring timeresolved neutron reflectivity. It was found from the measurement that Ag ions diffuse all over the matrix Ge 33 S 67 layer once Ag dissolves into the layer. We also found that the surface was macroscopically

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... deformed by the extended light exposure. Its structural origin was investigated by a scanning electron microscopy. Published by AIP Publishing. [http://dx.doi.org/10.1063/1.4959207] 055103-2 Sakaguchi et al. J. Appl. Phys. 120, 055103 (2016) 055103-5 Sakaguchi et al. J. Appl. Phys. 120, 055103 (2016) 055103-7 Sakaguchi et al. J. Appl. Phys. 120, 055103 (2016) 055103-10 Sakaguchi et al.