P4.5 - Comparison of resolution specifications for micro- and nanometer measurement techniques

Albert Weckenmann, Özgür Tan, Laura Shaw, Nils Zschiegner, AMA Association For Sensor Technology E.V., Sophie-Charlotten-Str. 15, 14059 Berlin, Germany
2009
In most of the measurement tasks of micro- and nanotechnology, a high resolution of the instrument is required. However in most cases, resolution specification of the manufacturer could not be verified due to the lack of an acceptance test for the experimental investigations. In many cases, specification of the resolution is directly taken from the manufacturing specifications, which are mostly theoretically calculated values and do not always represent the real performance of the system.
more » ... f the system. Instrument specific influencing factors, like the noise of data or the effect of optics are also needed to be considered during the investigation of real resolution performance. Because of this, it is required not only to develop calibration and testing tools but also to apply specific acceptance tests. In this article, results of the application of a Siemens-Star to investigate lateral resolution of different instruments are presented. Different surface measurement techniques such as white light interferometer, atomic force microscope and chromatic sensor are used as measurement devices. Results are compared not only with each other but also with manufacturer specifications. By this, the application of calibration and testing equipments for the investigation of resolution specifications is demonstrated.
doi:10.5162/sensor09/v2/p4.5 fatcat:m7dy3mcvyjdmdavmruonkuvqya