MEMS on/off and 1/spl times/2 optical switch with integrated fiber alignment capability

Cheah Wei Leow, A.B. Mohammad
2004 2004 IEEE International Conference on Semiconductor Electronics  
An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated. A fiber is put onto the cantilevers and by controlling the position of the flber through actuation, switching operation can be achieved. The device is also suitable for inpackage fiber alignment application, where the cantilevers can be used as passive or active fiber alignment microstructure.
doi:10.1109/smelec.2004.1620863 fatcat:epcgtrqq4zab5pqkshojqjb4oi